This system is designed to improve traditional time lapping operation process which relies on lap-and-look method where live feedback of object thickness is not available. Traditionally lapping time determines the amount of material to remove which is calculated using thickness information and lapping rate. The object thickness is measured at least 2 times during the course of lapping in order to calculate the lapping rate and to predict the lapping time required to reach desired stop point. The method assumes that the lapping rate stays constant. Any changes in lapping conditions will likely cause inconsistency in the lapping rate and, as a result, affect the stop-point accuracy.
Improving stop-point accuracy to ±1um using real-time feedback removal height information
Improving throughput by minimizing thickness measurement per lapping cycle